E Beam Evaporation Substrate Temperature

Argon gas flow of 10 sccm was introduced as a sputtering gas.

E beam evaporation substrate temperature.

Before deposi tion the substrate was pre sputtered in argon gas for 5 min. Physical vapor deposition pvd is a family of processes that is used to deposit layers of atoms or molecules from the vapor phase onto a solid substrate in a vacuum chamber. The electron beam causes atoms from the target to transform into the gaseous phase. For instance e beam evaporation heats the substrate but the amount of heating depends strongly on the geometry.

Normally low melting point materials such as organic polymers gold 1 064 c and aluminum 660 3 c we need electrical resistance evaporation so called thermal. These atoms then precipitate into solid form coating everything in the vacuum chamber within line of. Two very common types of processes used are sputtering and electron beam evaporation. We anticipate a deposition rate of 2 angstroms per second when the evaporation temperature is at 1 200 c.

Electron beam physical vapor deposition or ebpvd is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. Evaporation is one of the oldest pvd method ever used in coating technology especially the thermal evaporation that it consists mainly in transferring heat to a material in a vacuum environment 10 6 mbar or lower so that the material get to the vapur phase and spread all over the chamber condensing on the surrounsing surfaces. Thermal evaporation of silicon dioxide sio 2 we recommend heating the substrate to 350 c before attempting to thermally evaporate silicon dioxide. Both the films were deposited for 30 min with deposition rate of 0 11 nm s and 0 27 nm s for e beam evaporated and.

The substrate temperature was varied between 300 and 600 c. Electron beam e beam evaporation is a time tested deposition technology for producing dense high purity coatings. But for metal oxides which. The elements and binary chalcogenides compounds namely cu zns sns 2 or sn and s served as the sources for czts films.

The substrate temperature was kept same as in the case of e beam technique. In contrast sputtering is considered a cold technique and substrate heating.